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BENEFITS
OF THE STANDARD "MAK" SPUTTER SOURCE Only
this unique Planar Magnetron can provide ALL of these advantages
- Cathode
and magnets are ISOLATED FROM WATER - Design requires only ONE
vacuum seal -
Supplied as either HV or UHV - NO
water to Vacuum seal -
Sputters MAGNETIC MATERIAL -
Target requires NO CLAMPING or BONDING to cathode -
Operates in DC or RF power modes -
Sputters from 0.5 - 600 mTorr Ar. - Adjustable
anode, PREVENTS build up and shadowing
SELECT
A MAK SOURCE BELOW:
Terms and Conditions of Sale
(PDF File) |